Electron-beam lithography: How to make chips to order
نویسندگان
چکیده
منابع مشابه
Introduction to Electron Beam Lithography
Electron Beam Lithography is a specialized technique for creating extremely fine patterns (~ 50 nm). Derived from the early scanning electron microscopes, the technique in brief consists of scanning a beam of electrons across a surface covered with a resist film sensitive to those electrons, thus depositing energy in the desired pattern in the resist film. The main attributes of the technology ...
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ژورنال
عنوان ژورنال: Nature
سال: 1985
ISSN: 0028-0836,1476-4687
DOI: 10.1038/318592a0